NAME
Physics::Electrodeposition::CopperPlating - First-order copper electroplating model for Al/Ti seed layers
SYNOPSIS
use Physics::Electrodeposition::CopperPlating;
my $sim = Physics::Electrodeposition::CopperPlating->new(
wafer_diameter_mm => 300,
pattern_type => 'redistribution_lines',
convection => 'high',
target_thickness_um => 8,
);
my $result = $sim->simulate;
DESCRIPTION
This module provides a simple engineering estimate for copper electroplating on an aluminum and titanium seed stack for 200 mm and 300 mm wafers. It is meant for early process tradeoff studies rather than detailed electrochemical design.
METHODS
new(%args)
Creates a simulation object.
simulate(%overrides)
Returns a hash reference containing expected current, growth rate, plating time, and estimated within-wafer uniformity.
process_notes(%overrides)
Returns an array reference of process assumptions and qualitative notes.