NAME

Physics::Lithography - Laser Direct Imprint Lithography simulation framework

SYNOPSIS

use Physics::Lithography;

my $litho = Physics::Lithography->new(verbose => 1);

my $laser = $litho->laser(
    wavelength  => 355e-9,    # nm (UV)
    pulse_width => 10e-9,     # 10 ns
    fluence     => 0.5,       # J/cm²
    spot_size   => 5e-6,      # 5 µm
);

my $thermal = $litho->thermal(material => 'pmma');
$thermal->solve(laser => $laser, time => 100e-9);

1 POD Error

The following errors were encountered while parsing the POD:

Around line 96:

Non-ASCII character seen before =encoding in 'J/cm²'. Assuming UTF-8