NAME
Physics::Lithography - Laser Direct Imprint Lithography simulation framework
SYNOPSIS
use Physics::Lithography;
my $litho = Physics::Lithography->new(verbose => 1);
my $laser = $litho->laser(
wavelength => 355e-9, # nm (UV)
pulse_width => 10e-9, # 10 ns
fluence => 0.5, # J/cm²
spot_size => 5e-6, # 5 µm
);
my $thermal = $litho->thermal(material => 'pmma');
$thermal->solve(laser => $laser, time => 100e-9);
1 POD Error
The following errors were encountered while parsing the POD:
- Around line 96:
Non-ASCII character seen before =encoding in 'J/cm²'. Assuming UTF-8